Clean technology, also known as production environment and pollution control technology, is a comprehensive emerging science and technology developed with high technology in the past two or three decades. Clean technology specializes in the research and provides a clean production process environment and various high-purity media used in the production process to effectively control trace impurities to ensure the yield and reliability of high-tech products. Clean technology usually includes: air purification technology, air conditioning technology, water purification technology, gas purification technology, trace impurity control technology, clean environment monitoring technology and related environmental quality control technology. Purification engineering technology is widely used in high-tech industries such as electronics, nuclear, aerospace, bioengineering, pharmaceutical, precision machinery, chemical, food, automobile manufacturing and modern science.

For semiconductor devices, purification engineering plays an important role in microelectronics. The core of microelectronics technology is integrated circuits, and the production of integrated circuits places stringent requirements on the purification technology and equipment in their process environments and processes. During the "Ninth Five-Year Plan" period, China vigorously developed the information industry with microelectronics as its focus. In a certain sense, the level of purification engineering technology has become an important indicator of the scientific and technological level and industrial level of a country and region.

With the improvement of people's living standards in China, people have put forward higher and higher requirements for living environment and quality of life. High-purity water prepared by water purification equipment has been widely welcomed. Purification engineering technology has begun to enter thousands of households and enter people's modern life. .

The gap between China's clean technology and equipment is far from that of advanced countries. The HEPA filter that was only produced in China in 1965 is 15 years later than abroad. The light scattering dust particle counter, which began production in 1975, is twenty years later than abroad. 0.1 micron clean technology and equipment have become mature technologies in advanced countries in the world, and China has just started.

In order to adapt to the development of ultra-clean technology, the research on the use of high-efficiency filters has never been interrupted. For several years, new products with different structures and different properties have been developed. The United States has been developing 0.1 micron ULPA since 1979. Filters, in 1984, AAF of the United States began to produce 0.1 micron separatorless ULPA filters. Currently, 0.1 micron ULPA filters have been commercialized in the US AAF, FLANDERS and CAMBRIDGE. Japan has also become the world's largest producer of 0.1 micron ULPA filters. The wide variety and serialization of products, especially the development of low pressure loss type 0.1 micron ULPA filters, have solved the technical problems of initial resistance. The demand for high-efficiency air filters in the international market is large and growing every year. At present, Japan sells more than 1 million units per year, with an average price of 200 US dollars and sales of 200 million US dollars. China's high-efficiency air filter market demand is close to 100,000 units per year, accounting for 2% to 4% of the international market, but so far there is no 0.1 micron ULPA filter production, for ultra-large scale integrated circuit production of clean plants and various The 0.1 micron ULPA filter in the high-tech cleanroom is currently dependent on imports.

In the construction scale and technical level of clean rooms, the gap between China and advanced countries is even greater. Japan's Shimizu Construction Co., Ltd., the clean room area built between 1982 and 1987 reached 718,000 square meters, while the total clean room area under construction in China is less than 100,000 square meters, but during the Eighth Five-Year period Great development, the total area of clean rooms built in 1993 is close to 150,000 square meters. The clean room construction in the United States is even larger. In 1998, the statistics reached 1.885 million square meters. At the level of clean engineering technology, in the late 1980s, a large-scale clean room of 0.1 micron was built abroad. In 1987, Sanyo Niigata Plant in Japan built a 3,000-square-meter clean-up plant, and NIT logs built four 1000 square meters. The meter-scale plant that controls 0.1 micron dust has a gas exchange rate of 300 beats per minute. The new TSMCS plant in Taiwan has built a fourth-generation pipeline-type clean room with a total area of 10,000 square meters. The 0,1 micron class 10 clean room used in China mainly relies on imports from abroad. Due to the high cost of clean rooms with high cleanliness, the 0.1 micron Class 10 clean room costs more than $10,000 per square meter. In the investment of large-scale integrated circuit manufacturing equipment, the clean factory has a relatively high proportion, which is incompatible with the development trend of the integrated circuit process, and the product update cycle is getting faster and faster, which seriously restricts the large-scale integrated circuit technology. development of. Sub-micron production micro-environment system equipment and technology developed by American ASYST Company and German MW Company using isolation technology have been widely used in recent years. The latest clean technology in the 100 clean clean factory, using the micro-environment of the process equipment to use the isolation technology, the investment ratio is compressed to a high-level micro-environment, eliminating the secondary pollution source of operators and process equipment operation. The effect on the yield and availability of the integrated circuit is generated.

The international market for clean technology and equipment is huge. Japan’s sales of clean technology and equipment in the late 1980s and early 1990s exceeded $3.5 billion. Sales of clean equipment and basic components in advanced countries such as the US and Western Europe have reached $7.3 billion. According to the statistics of China Electronics Special Equipment Industry Association, the sales of the eight largest purification equipment factories in China were 82.17 million yuan in 1990, less than 100 million yuan. In 1993, it reached 144.95 million yuan, accounting for 0.34% of the international market sales. . However, with the rapid development of China's high and new technology and the development of microelectronics industry, optical fiber industry, liquid crystal display industry and optoelectronic device industry, bioengineering and pharmaceutical industry, China's potential huge clean technology product market is 40%~50% per year. The growth rate is increasing.